Wafer Map Defect Pattern

Wafer map defect pattern analysis aims to automatically identify and classify defects in semiconductor manufacturing, improving yield and reducing costly manual inspection. Current research focuses on developing advanced machine learning models, including convolutional neural networks, variational autoencoders, and even hybrid classical-quantum approaches, to efficiently analyze the complex spatial patterns of these defects. These efforts leverage techniques like topological data analysis and iterative clustering to enhance classification accuracy and handle diverse defect types, ultimately contributing to more efficient and reliable semiconductor production. The improved defect detection capabilities translate directly to higher yields and reduced environmental impact from wasted resources.

Papers