Diffusion-Based Inverse Design of Dielectric Resonator Metasurfaces for Shaping Smart Electromagnetic Environments

Inverse design of metasurfaces under continuous electromagnetic constraints requires generation of geometries that simultaneously satisfy stringent spectral specifications and remain manufacturable. Conventional approaches based on iterative full wave simulations are computationally prohibitive for large design spaces, while existing generative models often suffer from poor conditional controllability and limited fabrication awareness. In this regard, we propose a physics guided condition quality enhanced diffusion framework for the inverse design of metasurface based absorbers. Fabrication-aware constraints are incorporated to ensure practical realizability of the generated designs. The framework introduces a conditioning mechanism for continuous spectral specifications, wherein feature-wise linear modulation propagates the condition across the denoising hierarchy, enabling stable and accurate generation with improved spectral controllability. Further, to embed EM consistency directly into the generative learning process, a pre trained surrogate EM simulator is integrated within the diffusion training pipeline. The proposed framework generated physically realizable metasurface designs for diverse reflection characteristics in the frequency range of 2 to 18 GHz, achieving a very low average spectral mean squared error of 0.0006 and a high band alignment accuracy of 0.958. The framework also addresses the fundamentally non-unique nature of inverse EM design by enabling structured multimodal generation of geometrically distinct yet spectrally consistent metasurface designs for the same target response. The proposed model produces the suitable design in approximately 30 seconds, whereas the conventional approach can take several months under comparable computational resources. The efficiency of the model is also established via experimental measurements.

Metasurfaces enable precise manipulation of electromagnetic waves for applications such as beam steering, sensing, and stealth technology. However, inverse design of metasurfaces with targeted EM responses remains challenging due to the computational expense of iterative full wave simulation driven optimization and the limited conditioning fidelity and diversity of existing generative approaches. To address these challenges, this paper presents a generative inverse design framework for controllable and physically consistent metasurface synthesis under continuous spectral constraints. The proposed approach employs a progressively growing Wasserstein generative adversarial network with gradient penalty integrated with feature wise linear modulation based conditioning for stable propagation of continuous spectral and fabrication constraints. EM consistency is embedded directly into the generative learning process through a surrogate assisted spectral alignment loss, enabling physics constrained generation during training. Further, a determinantal point process based diversity regularization strategy is incorporated to generate geometrically diverse yet spectrally consistent realizations for the same target response. The effectiveness of the proposed framework is demonstrated through the generation of practically realizable metasurface absorbers exhibiting diverse reflection characteristics in the frequency range of 2 to 18 GHz. EM simulations validate that the generated designs meet the target specifications with high accuracy. The final proposed framework achieved an average mean squared error of 0.0052, diversity score of 0.8730, band alignment accuracy of 0.8533, and a valid EM design generation percentage of 89.57, clearly demonstrating its capability to generate highly accurate, diverse, electromagnetically consistent and fabrication realizable metasurface configurations.

Acoustic metamaterial (AMM) inverse design is particularly challenging for broadband target responses due to acoustic dispersion: a structure that matches the desired response at one frequency may deviate at others, and modifying geometry to improve one sub-band often perturbs neighboring sub-bands. Yet existing broadband inverse-design approaches are either constrained by predefined templates, or rely on image representations that fail to preserve the geometric precision and structural connectivity required by acoustic structures. We present MetaSeq, a physics-guided, sequence-based generative framework for acoustic metamaterial inverse design. At its core, MetaSeq introduces a language that represents each AMM as a structured sequence, rather than as a pixel grid or fixed template. This representation preserves precise geometry, explicitly encodes connectivity, and casts inverse design as a sequence-to-sequence task from target response to structure sequence. MetaSeq further constructs a balanced, high-fidelity dataset with efficient calibration and complexity-based sampling. To address the one-to-many nature of inverse design, MetaSeq combines supervised pretraining with reinforcement learning fine-tuning guided by a physics-based solver and validity checker. Extensive evaluations against COMSOL and five baselines show that MetaSeq reduces response error by 45% over the best baseline.