Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation

Gradient-based inverse lithography technology~(ILT) for extreme ultraviolet~(EUV) masks is presented. A novel framework treats the differentiable waveguide method and the recently proposed waveguide neural operator~(WGNO) as end-to-end physics engines, recovering the permittivity of the absorber of the mask through automatic differentiation of the full forward diffraction model. Numerical experiments on realistic 2D and 3D absorbers of the mask (TaBN, La, U) at $λ{=}11.2$~nm show that the considered ILT methods make it possible to obtain a mask structure that achieves the desired field on the wafer.

Physics-informed neural operators (PINOs) aim to learn solution operators for partial differential equations by using the governing physics as supervision, rather than relying solely on paired input-output simulation data. By incorporating physical constraints into the training objective, PINOs combine the cross-instance generalization of neural operators with the data efficiency of physics-informed learning. Despite this promise, how to train PINOs efficiently and robustly remains less well-understood than the training of either data-driven neural operators or physics-informed neural networks (PINNs). To bridge this gap, we examine key components of the PINO training pipeline, including architecture design, optimizer choice, loss balancing, and collocation-point sampling strategy. We study three representative operator backbones, Deep Operator Network (DeepONet), Fourier Neural Operator (FNO), and Continuous Vision Transformer (CViT), across five diverse parametric PDE systems. Our results show that CViT provides consistently strong and stable performance across the considered benchmarks. Beyond architecture, we find that several optimization pathologies previously identified in PINN training naturally arise in PINOs, including gradient conflicts and causal violation. We also find that mitigation algorithms developed for PINNs remain effective in the PINO setting. We further compare physics-informed and data-driven training under different data regimes, revealing that a carefully designed physics-informed training pipeline can match, and in some cases, outperform purely data-driven neural operators. Taken together, these findings provide a systematic empirical understanding of the optimization challenges in PINO training and inform a practical pipeline for efficient and robust physics-informed operator learning. Code and data are available at https://github.com/NanxiiChen/PI-CViT.

Physics-informed neural operators (PINOs) have recently gained attention as fast numerical simulators with potential for solving inverse problems. This study proposes the first PINO-based method for speech production analysis. The model learns the governing one-dimensional wave equations directly without requiring pre-computed supervised training data. Using vocal tract shape data as input features, we compare the proposed model's predicted f0, glottal volume velocity and sound pressure at the lip for five static vowels to a conventional Runge Kutta/Finite difference approach. With errors of 0.8% for glottal volume flow and 3.2% for speech waveforms, the proposed model enables efficient GPU-parallelized simulation without iterative calculations. We conclude that PINO is a promising approach for fast analysis of speech.