Diffusion models have achieved outstanding performance in unsupervised industrial anomaly detection (uIAD) by learning a manifold of normal data under the common assumption that off-manifold anomalies are harder to generate, resulting in larger reconstruction errors in data space or lower probability densities in the tractable latent space. However, their iterative denoising and noising nature leads to slow inference. In this paper, we propose OSD-IRF, a novel one-step diffusion with inverse residual fields, to address this limitation for uIAD task. We first train a deep diffusion probabilistic model (DDPM) on normal data without any conditioning. Then, for a test sample, we predict its inverse residual fields (IRF) based on the noise estimated by the well-trained parametric noise function of the DDPM. Finally, uIAD is performed by evaluating the probability density of the IRF under a Gaussian distribution and comparing it with a threshold. Our key observation is that anomalies become distinguishable in this IRF space, a finding that has seldom been reported in prior works. Moreover, OSD-IRF requires only single step diffusion for uIAD, thanks to the property that IRF holds for any neighboring time step in the denoising process. Extensive experiments on three widely used uIAD benchmarks show that our model achieves SOTA or competitive performance across six metrics, along with roughly a 2X inference speedup without distillation.
Latent defect screening is challenged by extremely low failure rates, high-dimensional test data, and absence of labeled anomalies. We propose the first unsupervised anomaly detection framework incorporating a Diffusion Transformer. Raw test measurements are first compressed by an autoencoder, then reshaped into a structured token sequence enriched with sinusoidal and per-device wafer-position embeddings. Anomaly scores are derived from the noise-prediction error over mid-range diffusion timesteps, enabling fast wafer-scale screening without any labeled defects or manual feature engineering. Our approach achieves state-of-the-art performance on industrial 16nm IC test data under extreme class imbalance, offering interpretable failure localization through latent-space reconstruction residuals.
Industrial anomaly inspection faces a major challenge due to the lack of real-world anomaly samples. While generative models are used to create anomaly data, existing methods still struggle when handling small-scale anomalies. This failure occurs because extreme downsampling in diffusion models causes the information of small anomalies to be lost in the latent space. To address this, we introduce UniScale, a unified training and inference framework for high-fidelity industrial anomaly generation across arbitrary scales. During training, we introduce an Error-Suppressed Multi-Scale Training (EMT) strategy, which enables the model to learn the rich location-aware textures of anomalies, while suppressing upsampling-induced interpolation errors in texture acquisition, ensuring the model is capable of learning small-scale anomalies, while remaining effective for regular scale anomalies. For inference, we propose Generation-then-Fusion Denoising. It decouples anomaly generation from background integration, preventing small anomalies from being overwhelmed. Extensive experiments demonstrate that our method outperforms state-of-the-art competitors in both anomaly generation quality and downstream detection performance. It achieves a relative IS(a) improvement of 45.86% (from 1.81 to 2.64) on VisA and 37.70% (from 1.22 to 1.68) on MVTec AD 2, while also improving the downstream pixel-level IoU by 4.22% on VisA and AUROC by 6.55% on MVTec AD 2. Code is available at https://github.com/HUST-SLOW/UniScale.
Continual industrial anomaly detection with diffusion models suffers from historical normality prior drift and catastrophic forgetting. Existing continual diffusion methods preserve previous knowledge through replay or constrained optimization, but they lack an explicit mechanism for isolating and protecting category-specific normality priors during sequential adaptation. Although low-rank adaptation provides modular residual updates, standard LoRA neither freezes historical normality subspaces nor prevents new adapters from interfering with previous ones. To address this issue, we propose a normality-preserving continual anomaly detection framework based on two modules: History Frozen Orthogonal LoRA Bank (HF-OLB) and Hierarchical Novelty Adaptive Bank Growth module (HNABG). HF-OLB freezes both the pre-trained U-Net backbone and the learned LoRA banks, and constrains new task-specific normality residuals to the orthogonal complement of historical LoRA subspaces. HNABG further allocates layer-dependent residual capacity and expands the bank only when the residual normality novelty exceeds the expressive capacity of existing banks. Extensive experiments on MVTec and VisA demonstrate the effectiveness of the proposed method. On the challenging VisA 2x6 setting, our method achieves 83.6/91.8 image and pixel level A-AUROC with 3.8/3.9 FM, improving pixel level A-AUROC over the state of the art by 3.2 points while reducing pixel level FM by 1.3. These results show that our method effectively preserves historical normality priors in long horizon continual category sequences.