Hybrid Quantum-MambaVision: A Quantum-enhanced State Space Model for Calibrated Mixed-type Wafer Defect Detection

We present WaferSAGE, a framework for wafer defect visual question answering using small vision-language models. To address data scarcity in semiconductor manufacturing, we propose a three-stage synthesis pipeline incorporating structured rubric generation for precise evaluation. Starting from limited labeled wafer maps, we employ clustering-based cleaning to filter label noise, then generate comprehensive defect descriptions using vision-language models, which are converted into structured evaluation rubrics criteria. These rubrics guide the synthesis of VQA pairs, ensuring coverage across defect type identification, spatial distribution, morphology, and root cause analysis. Our dual assessment framework aligns rule-based metrics with LLM-Judge scores via Bayesian optimization, enabling reliable automated evaluation. Through curriculum-based reinforcement learning with Group Sequence Policy Optimization (GSPO) and rubric-aligned rewards, our 4B-parameter Qwen3-VL model achieves a 6.493 LLM-Judge score, closely approaching Gemini-3-Flash (7.149) while enabling complete on-premise deployment. We demonstrate that small models with domain-specific training can surpass proprietary large models in specialized industrial visual understanding, offering a viable path for privacy-preserving, cost-effective deployment in semiconductor manufacturing.

Realizing quantum neural networks (QNNs) in industry requires knowing which quantum computing paradigm suits which task. Motivated by AI accelerators and high-bandwidth memory, where die stacking makes wafer-level defect screening central to yield, we study WM-811K wafer-map defect classification (eight classes), comparing the dominant paradigms, continuous-variable (CV) and discrete-variable (DV), under controlled conditions. To isolate the quantum circuit as the sole variable, a shared convolutional backbone (~4.3M parameters) feeds interchangeable heads (classical dense, CV-QNN, or DV-QNN) as the only structural difference; each quantum head is scaled over three sizes (3, 4, 8 qumodes/qubits). The CV head consistently outperforms the DV head: at four qumodes/qubits it reaches 79.7 +/- 1.8% accuracy versus 61.6 +/- 1.4%, a non-overlapping 18-point gap. The advantage is sharpest on the spatially localized Edge-Loc class, easily confused with Scratch, which CV recovers with recall 0.66 +/- 0.06 while DV fails at every size (<=0.05), showing the structured CV layer better captures fine spatial distinctions between defect types. Training curves show the DV limitation is a representational-capacity ceiling, not an optimization failure; at the Fock cutoff used here (d = 2) the CV advantage reflects two intrinsic properties, a structured, neural-network-analogue layer and continuous phase-space encoding, not Hilbert-space dimensionality. On IBM hardware, DV accuracy holds at shallow depth, degrading only at the deepest circuit. Both quantum heads remain below the classical baseline (85.0%), but the controlled setting isolates where a structured head already helps and, as noise and scale improve, which paradigm can deliver practical advantage.

In semiconductor manufacturing, defect analysis is essential, but manual inspection cannot scale. However, existing automated inspection methods remain insufficient for root-cause analysis and process optimization. To this end, we present SePArate, a weakly supervised wafer defect segmentation method. SePArate enables pixel-level separation of patterns by leveraging only image-level annotations. It consists of a three-phase training: encoder pretraining, knowledge transfer to learn spatial cues, and training on synthetic mixed-defect data for accurate segmentation. Experiments demonstrate that SePArate outperforms the baselines.