Semiconductor Manufacturing

Overview

Semiconductor manufacturing studies how to fabricate, measure, inspect, and assemble chips while controlling defects, cost, and production time. Work spans lithography and etch simulation, wafer and package inspection, virtual metrology, equipment maintenance, and fab scheduling. Common approaches include computer vision and self-supervised learning for inspection, physics-informed neural networks and operators for process simulation, and optimization or reinforcement learning for process settings and factory control. A central challenge is making models reliable beyond limited, proprietary training data while preserving physical accuracy, quantifying uncertainty, and validating decisions in production.

Latest papers

CardsList

45 papers7 papers in the last four weeks, up 17% on the four weeks before. 0.0% of all new papers.

  1. Real-to-Sim Calibration of Bosch Etching Simulators with Few-Shot XSEM Data and Hybrid Search

    Oct 22, 2026Xinyu Jia, Jainil Shah, Rahul Tripathi +2Real-to-Sim TransferSemiconductor Manufacturing

  2. LithoWorld: An Endpoint World Model for Lithography Process-Window Recovery

    Oct 16, 2026Botong Zhao, Fang Yu, Xinyuan Chen +1Semiconductor ManufacturingWorld Model Learning

  3. GNN-Guided Local Refinement for Efficient Layout Decomposition with DSA-MP

    Oct 15, 2026Yu Feng, Liyi Zhou, Haoyu Wang +5Semiconductor ManufacturingElectronic Design Automation

  4. Feature identification for parameter extraction and defect detection using machine learning

    Oct 5, 2026Yan Guo, Helda Pahlavani, Artem Khachaturiants +5Semiconductor ManufacturingIndustrial Inspection

  5. Image resolution enhancement for advanced semiconductor nodes

    Oct 5, 2026Lucas Rencker, Omid Tajalizadehkhoob, Khalid Elsayed +7Semiconductor ManufacturingImage Super-Resolution

  6. VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography

    Sep 26, 2026Tianyi Li, Wenxuan Dong, Donger Luo +5Semiconductor ManufacturingLarge Language Model-Guided Optimization

  7. Morphology-Aware Ambiguity Learning for Wafer Defect Decision Support

    Sep 18, 2026Seungjun Chu, Seokhyun ChungClassificationSemiconductor Manufacturing

  8. A Two-Mirror Faceted Projection System for EUV Lithography

    Sep 10, 2026Vasiliy A. Es'kin, Egor V. Ivanov, Olga V. MartynovaSemiconductor Manufacturing

  9. Learning-Assisted Congestion-Aware Route Scheduling for Semiconductor Fab Material Control Systems

    Aug 31, 2026Hao Yin, Meiqi Tu, Anbang Liu +2Real-Time SchedulingSemiconductor Manufacturing

  10. Uncertainty and Business-Aware Remaining Useful Life Estimation for Semiconductor Manufacturing

    Aug 26, 2026Davide Frizzo, Francesco Borsatti, Gian Antonio SustoRUL EstimationPredictive Maintenance

  11. Forward and Inverse Virtual Metrology for Phototransistor Gain: A Hierarchical, Uncertainty-Aware Approach for Small Production Datasets

    Aug 12, 2026Mahshid Amirabgir, Lorenza Ferrario, Paolo Conci +2Uncertainty QuantificationSemiconductor Manufacturing

  12. Adaptive Sequential Test Planning for Multi-Mechanism Reliability Qualification via Bayesian Monte Carlo Tree Search

    Aug 10, 2026Youssef A. Elhagrasy, Ian Hill, André IvanovSemiconductor ManufacturingMonte Carlo Tree Search

  13. A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion

    Jul 31, 2026Ning Hu, Chang Liu, Yunlei Jiang +1Neural Surrogate ModelingParameter Identifiability

  14. Dynamic Multi-Criteria Bottleneck Severity Index (DMBSI) for Semiconductor Wafer Manufacturing: A Genetically Optimised Framework for Reentrant Production Systems

    Jul 17, 2026Mohammad Sharifur Rahman, Karl McCreadie, Saugat Bhattacharyya +5ManufacturingSemiconductor Manufacturing

  15. ScratNet: A Swin-Based Multi-Scale Dilated Network with Precision Refinement for Semiconductor Scratch Segmentation

    Jul 11, 2026Sachin Ranjan, Hoon KimImage SegmentationVision Transformer

  16. LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography

    Jun 25, 2026Yuqi Jiang, Yumeng Liu, Zimu Li +7World Model LearningSemiconductor Manufacturing

  17. Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator

    Jun 24, 2026Vasiliy A. Es'kin, Egor V. IvanovSemiconductor ManufacturingInverse Design

  18. High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology

    Jun 23, 2026Johannes Boehm, Bappaditya DeySemiconductor ManufacturingSynthetic Data Generation

  19. Failure Analysis in Transition: An Industry Survey of Challenges, Priorities, and Standardization Needs in Advanced Packaging and Heterogeneous Integration

    Jun 20, 2026Himanandhan Reddy Kottur, Nusra Akter Takia, Mahamudul Hassan Fuad +3Semiconductor Manufacturing

  20. Event-Driven Reinforcement Learning Enables Long-Horizon Control in Semiconductor Fabrication

    Jun 9, 2026Yavar Yeganeh, Mahsa Shekari, Nicla Frigerio +2RL ControlMulti-Objective Reinforcement Learning

  21. Trustworthy Smart Fabs via Professional Proxies: Scaling Safe and Sustainable by Design (SSbD) through Industrial Data Spaces

    Jun 8, 2026Han-Teng Liao, Chang-Yi Kao, Karen AngSemiconductor ManufacturingAI Agent Governance