Semiconductor Manufacturing

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1 paper in the last four weeks, down 75% on the four weeks before. 0.0% of all new papers.

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  1. Simplified Swarm Optimization for Surrogate-Assisted Reliability Design of Insulated-Gate Bipolar Transistor Power Modules Using an Open-Source Process Finite-Element Model

    Oct 5, 2026Wei-Chang YehSurrogate-Assisted OptimizationSemiconductor Manufacturing

    Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu 300044, Taiwan

  2. Feature identification for parameter extraction and defect detection using machine learning

    Oct 5, 2026Yan Guo, Helda Pahlavani, Artem Khachaturiants +5Semiconductor ManufacturingIndustrial Inspection

    Nearfield Instruments, B.V. (The Netherlands)

  3. Image resolution enhancement for advanced semiconductor nodes

    Oct 5, 2026Lucas Rencker, Omid Tajalizadehkhoob, Khalid Elsayed +7Semiconductor ManufacturingImage Super-Resolution

    Nearfield Instruments, B.V. (The Netherlands)

  4. A Two-Mirror Faceted Projection System for EUV Lithography

    Sep 10, 2026Vasiliy A. Es'kin, Egor V. Ivanov, Olga V. MartynovaSemiconductor Manufacturing

    Department of Radiophysics, University of Nizhny Novgorod 23 Gagarin Ave., Nizhny Novgorod 603022, Russia

  5. Learning-Assisted Congestion-Aware Route Scheduling for Semiconductor Fab Material Control Systems

    Aug 31, 2026Hao Yin, Meiqi Tu, Anbang Liu +2Real-Time SchedulingSemiconductor Manufacturing

    Department of Data and Systems Engineering, The University of Hong Kong · The Research Center for Digital Production and Smart Logistics, Tsinghua University

  6. SePArate: Segmenting Patterns from Defects in Wafer Manufacturing Using Weak Supervision

    Aug 31, 2026Dain Kwon, Changmin Shin, Sunjong Park +5Weakly Supervised Image SegmentationSemiconductor Manufacturing

    Seoul National University · SK Hynix

  7. Forward and Inverse Virtual Metrology for Phototransistor Gain: A Hierarchical, Uncertainty-Aware Approach for Small Production Datasets

    Aug 12, 2026Mahshid Amirabgir, Lorenza Ferrario, Paolo Conci +2Uncertainty QuantificationSemiconductor Manufacturing

    Micro Nano Facility (MNF), Center for Sensors and Devices, Fondazione Bruno Kessler (FBK), Via Sommarive 18, Povo (Trento), 38123, Italy. · Microfab Solutions, Via Sommarive 18, Povo (Trento), 38123, Italy. · Department of Civil and Environmental Engineering (DICA), Politecnico di Milano, Piazza Leonardo da Vinci 32, Milan, 20133, Italy. +1

  8. Adaptive Sequential Test Planning for Multi-Mechanism Reliability Qualification via Bayesian Monte Carlo Tree Search

    Aug 10, 2026Youssef A. Elhagrasy, Ian Hill, André IvanovSemiconductor ManufacturingMonte Carlo Tree Search

    Department of Electrical and Computer Engineering, University of British Columbia, Vancouver, BC V6T 1Z4, Canada

  9. LDU-Bench: Multimodal LLM Evaluation for Lithography Defect Understanding under Layout-Varying Circuit Backgrounds

    Aug 4, 2026Huanglong Ji, Botong Zhao, Shujing Lv +1Semiconductor ManufacturingMultimodal Large Language Models

  10. A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion

    Jul 31, 2026Ning Hu, Chang Liu, Yunlei Jiang +1Neural Surrogate ModelingParameter Identifiability

    School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou, China · Information Engineering School, Hangzhou Dianzi University, Hangzhou, China

  11. Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation

    Jul 28, 2026Doyun Kim, Werner GillijnsFourier Neural OperatorSemiconductor Manufacturing

    IMEC, Kapeldreef 75, 3001 Leuven, Belgium

  12. Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)

    Jul 25, 2026Karen Ang, Han-Teng LiaoSemiconductor ManufacturingSupply Chain Management

    Dept. Process Engineering · Kulim, Malaysia · Independent Researcher +1

  13. Formal Foundations for Known Good Reliable Die Screening in Chiplet-Based AI Systems-on-Chip

    Jul 22, 2026Prashanthi Metku, Chandra GanduSemiconductor Manufacturing

    Qualcomm Technologies, Inc., USA

  14. Dynamic Multi-Criteria Bottleneck Severity Index (DMBSI) for Semiconductor Wafer Manufacturing: A Genetically Optimised Framework for Reentrant Production Systems

    Jul 17, 2026Mohammad Sharifur Rahman, Karl McCreadie, Saugat Bhattacharyya +5ManufacturingSemiconductor Manufacturing

    Intelligent Systems Research Centre, Ulster University, Londonderry BT48 7JL, U.K. · Seagate Technology, Londonderry BT48 0BF, Northern Ireland, U.K. · Seagate Technology, One Disc Drive, Shakopee, MN 55379, USA

  15. ScratNet: A Swin-Based Multi-Scale Dilated Network with Precision Refinement for Semiconductor Scratch Segmentation

    Jul 11, 2026Sachin Ranjan, Hoon KimImage SegmentationVision Transformer

    Machine Intelligence and Data Science (MINDS) Lab and the M.S. Program in Electronics Engineering, Incheon National University, Incheon 22012, South Korea · Machine Intelligence and Data Science (MINDS) Lab and the Department of Electronics Engineering, Incheon National University, Incheon 22012, South Korea

  16. LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography

    Jun 25, 2026Yuqi Jiang, Yumeng Liu, Zimu Li +7World Model LearningSemiconductor Manufacturing

    Zhejiang University, No. 38 Zheda Road, Xihu District, Hangzhou, Zhejiang Province, China.

  17. Gradient-based inverse lithography for EUV masks via the waveguide method and a physics-informed neural operator

    Jun 24, 2026Vasiliy A. Es'kin, Egor V. IvanovSemiconductor ManufacturingInverse Design

    Department of Radiophysics, University of Nizhny Novgorod 23 Gagarin Ave., Nizhny Novgorod 603022, Russia

  18. High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology

    Jun 23, 2026Johannes Boehm, Bappaditya DeySemiconductor ManufacturingSynthetic Data Generation

    Chemnitz University of Technology, Chemnitz, Germany · Interuniversity Microelectronics Centre (imec), Leuven, Belgium

  19. Failure Analysis in Transition: An Industry Survey of Challenges, Priorities, and Standardization Needs in Advanced Packaging and Heterogeneous Integration

    Jun 20, 2026Himanandhan Reddy Kottur, Nusra Akter Takia, Mahamudul Hassan Fuad +3Semiconductor Manufacturing

    Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA · Florida Semiconductor Engine, Kissimmee, FL, USA

  20. Event-Driven Reinforcement Learning Enables Long-Horizon Control in Semiconductor Fabrication

    Jun 9, 2026Yavar Yeganeh, Mahsa Shekari, Nicla Frigerio +2RL ControlMulti-Objective Reinforcement Learning

    Politecnico di Milano · STMicroelectronics

  21. Trustworthy Smart Fabs via Professional Proxies: Scaling Safe and Sustainable by Design (SSbD) through Industrial Data Spaces

    Jun 8, 2026Han-Teng Liao, Chang-Yi Kao, Karen AngSemiconductor ManufacturingAI Agent Governance

    Independent Researcher Penang, Malaysia · Dept. Computer Science and Information Management Soochow University Taipei, Taiwan · Independent Researcher Kulim, Malaysia

  22. Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

    Jun 8, 2026Yaser Mike Banad, Sarah SharifManufacturingConstrained Generative Modeling

    School of Electrical and Computer Engineering, University of Oklahoma · 3Intelligent Neuromorphic and Quantum Understanding for Innovative Research and Engineering (INQUIRE) Laboratory · 4Material Science and Engineering Program, University of Oklahoma, Norman, OK 73019 USA +1

  23. Failure-Aware Refinement of Vision-Language Model for Lithography Defect Detection

    Jun 8, 2026Pangyun Jeong, Jiyeong Kong, Yuehua Hu +2Vision-Language ModelsVLM Adaptation

    1HYU-KITECH Joint Department, Hanyang University, Ansan, 15588, Korea · 4Korea Institute of Industrial Technology, Ansan, 15588, Korea · 2Micro/Nano System Department, Korea University, Seoul 02841, Korea +1

  24. LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching

    May 29, 2026Yao Lai, Xuyuan Xiong, Zeyue Xue +7Semiconductor ManufacturingInverse Design

    The University of Hong Kong, Hong Kong · University of Cambridge, Cambridge, UK · The Chinese University of Hong Kong, Hong Kong +2

  25. FAB-Bench: A Framework for Adaptive RAG Benchmarking in Semiconductor Manufacturing

    May 26, 2026Jingbin Qian, Congwen Yi, Min Xia +3Retrieval-Augmented GenerationBenchmark Design

    FutureFab.AI

  26. Diffuse to Detect: Generative Diffusion Models for Unsupervised IC Anomaly Detection

    May 26, 2026Yuxuan Yin, Chen He, Todd Jacobs +4Semiconductor ManufacturingIndustrial Anomaly Detection

    Department of Electrical and Computer Engineering, University of California Santa Barbara, CA, USA · Automotive Processing, NXP Semiconductors, TX, USA

  27. AOI-SSL: Self-Supervised Framework for Efficient Segmentation of Wire-bonded Semiconductors In Optical Inspection

    May 12, 2026Joaquín Figueira, Rob Van Gastel, Giacomo D'Amicantonio +4Self-Supervised Pre-TrainingSemiconductor Manufacturing

    AIMS Lab, Eindhoven University of Technology · CoC, ASMPT · iCIS, Radboud University

  28. Robust and Reliable AI for Predictive Quality in Semiconductor Materials Manufacturing with MLOps and Uncertainty Quantification

    May 8, 2026Min Gao, Julia Maria Perathoner, Anton Ludwig Bonin +2Concept DriftSemiconductor Manufacturing

    Merck Group, Versum Materials US LLC, Wilmington, USA · Merck Group, Merck Electronics KGaA, Darmstadt, Germany · Technical University of Darmstadt, Darmstadt, Germany +1

  29. Exploring CoCo Challenges in ML Engineering Teams: Insights From the Semiconductor Industry

    May 8, 2026A. Azamnouri, M. Haug, L. Woltmann +3Software EngineeringSemiconductor Manufacturing

    Chair of Software Engineering, TUM School of Computation, Information and Technology, Technical University of Munich, Heilbronn, Germany · Zeiss, Oberkochen, Germany · Business School, Pforzheim University, Pforzheim, Germany +1

  30. Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry

    May 6, 2026Jules Exbrayat, Renan Bouis, Elie Sezestre +4Neural Surrogate ModelingSemiconductor Manufacturing

    Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France

  31. WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning

    Apr 30, 2026Ke Xu, Zhongyuan LianVLM EvaluationVisual Question Answering

    Shanghai Huahong Grace Semiconductor Manufacturing Corporation, Shanghai, 201203, China · Dept. of Automation, School of Information Science and Engineering, East China University of Science and Technology, Shanghai, 200237, China