Abstract
The convergence of the 2026 European Union Safe and Sustainable by Design (SSbD) framework, Corporate Sustainability Due Diligence Directive (CSDDD), and Carbon Border Adjustment Mechanism (CBAM) introduce a severe governance bottleneck for advanced semiconductor manufacturing facilities ("Smart Fabs"). Regulatory compliance demands have surpassed the capacity of manual corporate reporting, creating a direct conflict between multi-stakeholder transparency and corporate data privacy. This paper addresses this challenge by introducing a zero-trust socio-technical orchestration framework that operationalizes a six-layer SSbD reference architecture within trustworthy industrial data spaces. We propose a shift from reactive automation to autonomous governance through "Professional Proxies"-role-based agentic workflows executing within hardware-isolated trust zones. Structured as an interoperable network protocol stack, the framework coordinates an automated, five-step "relay race" between Facility, Process Engineering, and Finance proxy teams to align factory-floor yield models with macro-level sustainability mandates. By executing Virtual Metrology (VM) predictions and Federated Machine Learning (FML) inside hardware-rooted Trusted Execution Environments (TEEs), this architecture resolves the Data Sovereignty Paradox, demonstrating how fabs can export cryptographically signed compliance tokens via International Data Spaces (IDS) connectors without exposing proprietary process recipes. Ultimately, this framework provides technology managers with a verifiable, evidence-based pathway toward resilient, net-zero Industry 5.0 ecosystems.
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