Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)

The convergence of the 2026 European Union Safe and Sustainable by Design (SSbD) framework, Corporate Sustainability Due Diligence Directive (CSDDD), and Carbon Border Adjustment Mechanism (CBAM) introduce a severe governance bottleneck for advanced semiconductor manufacturing facilities ("Smart Fabs"). Regulatory compliance demands have surpassed the capacity of manual corporate reporting, creating a direct conflict between multi-stakeholder transparency and corporate data privacy. This paper addresses this challenge by introducing a zero-trust socio-technical orchestration framework that operationalizes a six-layer SSbD reference architecture within trustworthy industrial data spaces. We propose a shift from reactive automation to autonomous governance through "Professional Proxies"-role-based agentic workflows executing within hardware-isolated trust zones. Structured as an interoperable network protocol stack, the framework coordinates an automated, five-step "relay race" between Facility, Process Engineering, and Finance proxy teams to align factory-floor yield models with macro-level sustainability mandates. By executing Virtual Metrology (VM) predictions and Federated Machine Learning (FML) inside hardware-rooted Trusted Execution Environments (TEEs), this architecture resolves the Data Sovereignty Paradox, demonstrating how fabs can export cryptographically signed compliance tokens via International Data Spaces (IDS) connectors without exposing proprietary process recipes. Ultimately, this framework provides technology managers with a verifiable, evidence-based pathway toward resilient, net-zero Industry 5.0 ecosystems.

In an era defined by escalating climate change and the pervasive deployment of edge intelligence, the environmental cost of semiconductor manufacturing and operation has reached a critical threshold. As Deep Learning (DL) accelerators dominate System-on-Chip (SoC) die area, achieving true sustainability requires a paradigm shift from static worst-case efficiency to dynamic energy-proportionality. This paper introduces Eco-SoC, a highly scalable VLSI architecture co-designed specifically for sustainable artificial intelligence. We propose a hardware-level Dynamic Precision-Scaling Logic (DPSL) framework that adaptively modulates bit-width precision based on real-time activation sparsity, successfully reducing switching activity by up to 42% on a commercial 7nm FinFET process node. Furthermore, we transcend traditional Power-Performance-Area (PPA) metrics by providing a comprehensive Life Cycle Assessment (LCA) using the Architectural Carbon footprint Tool (ACT). Our synthesis demonstrates that Eco-SoC offsets its increased embodied carbon footprint (a marginal 4.8% area overhead) within 1.1 years of edge deployment. Finally, by introducing a thermal-aware power gating mechanism that mitigates localized hotspots, Eco-SoC doubles the projected Mean Time To Failure (MTTF) of the silicon, providing a tangible, scalable strategy for electronic waste (e-waste) mitigation in next-generation computing systems.

The rapid integration of artificial intelligence (AI) into critical infrastructure including healthcare, finance, energy, and defense, offers transformative benefits but also conflicts with evolving regulatory and governance frameworks. This paper presents a systematic literature review (SLR) to examine the challenges of balancing AI compliance and technological innovation across critical infrastructure sectors. The review follows established SLR guidelines to extract and synthesize insights from peer-reviewed articles, report, and institutional sources published between 2020-2025. The study identifies three interrelated challenges: fragmented regulations, excessive compliance burdens for smaller to medium enterprises (SMEs), and misaligned governance models. To address these challenges, the study highlights practical governance strategies, including risk-tiered regulation, compliance by design, and explainable AI, to support scalable and trustworthy AI deployment in critical sectors. Key contributions include a concise mapping of core AI-governance challenges and a conceptual diagram illustrating their overlap, as well as actionable strategies for policymakers and practitioner to harmonize oversight with innovation.