Learning-Assisted Congestion-Aware Route Scheduling for Semiconductor Fab Material Control Systems

Large-scale industrial robot fleets share constrained physical infrastructure, making vehicle travel times dependent on safety separation, intersection access, downstream blocking, and station contention. We study this problem in overhead hoist transport (OHT) systems, a representative ceiling-mounted material-handling system used in semiconductor fabs. Static shortest-path routing cannot account for these time-varying traffic costs, whereas tabular Q-routing adapts online but learns each destination--node--action value independently, limiting information sharing across sparsely visited routing contexts and making startup behavior sensitive to inaccurate value estimates. We propose Neural Double Q-routing, which replaces destination-indexed tables with a shared state--action value network. The network is warm-started through return-to-go regression on mixed simulator-generated routing trajectories and then refined online using Double-Q updates, local congestion correction, and event-stratified structured replay. Across nine matched fleet-size--arrival-rate settings with 100, 150, and 200 OHTs, the proposed framework reduces mean completion time relative to tabular Double Q-routing by $0.8\%$--$8.8\%$. It achieves the lowest mean completion time among all compared methods in the six 150- and 200-OHT settings, whereas Dijkstra remains best in the three 100-OHT settings. Completed-task counts remain within $1\%$ of tabular Double Q-routing in eight of nine settings, and 95th-percentile completion time decreases in eight settings. In two matched startup scenarios, offline initialization increases the number of completed tasks by up to $23\%$ and reduces tail completion time by up to $15\%$.

In warehouse logistics, parcels released from the outfeed of an automated storage system must be routed through conveyor networks to workstations. Beyond collision avoidance, practical operations impose an additional requirement of order-contiguous arrivals: at each delivery point, parcels belonging to the same order must arrive as a consecutive block in the arrival sequence to reduce downstream re-sorting effort. We formalize this problem as online multi-agent path finding with order-contiguity (online MAPF-OC), where agents (i.e., parcels) appear over time and exit upon delivery. To efficiently solve online MAPF-OC, we propose Dual-Ordering Prioritized Planning (DOPP), a complete polynomial-time algorithm with a three-level structure that (i) searches order-level arrival sequences, (ii) refines agent-level priorities, and (iii) synthesizes feasible solutions via prioritized planning. Experiments on various conveyor-network layouts, including those derived from actual warehouses, demonstrate DOPP's practical scalability and ability to generate high-quality plans within tight time budgets.

Accurate routability estimation during physical design is important for reducing costly post-routing iterations. Prior learning-based methods treat this task as deterministic prediction, mapping placement-stage features to a single congestion or DRC outcome. We instead formulate routability estimation as a conditional generation problem, where both routing congestion and DRC violations are modeled as spatially structured routability fields. Our framework, Conditional Latent Diffusion for Routeability estimation (CLDRoute), uses physics-aware conditioning and task-specific latent modeling to handle the different characteristics of congestion and DRC maps. This allows our method to supports sample-based inference, producing both a mean prediction and a spatial uncertainty estimate for the same input design. On CircuitNet 2.0 (N28), our method achieves, for DRC violation generation, an SSIM of 0.9678, an MAE of 0.0028, and a TopK@1% of 0.3494; for congestion generation, it achieves an SSIM of 0.9031, an MAE of 0.0286, and an NZ-Pearson of 0.3692. Overall, our framework provides a more practical view of routability at placement by generating both the expected outcome and its uncertainty.