From Artefact to Insight: Efficient Low-Rank Adaptation of BrushNet for Scanning Probe Microscopy Image Restoration

Advanced semiconductor nodes are pushing the limits of feature sizes and require metrology with sub-nm resolution without compromising on the throughput as needed for in-line process control. Recently, high-throughput scanning probe microscopy (SPM) based metrology and inspection tools capable of meeting these needs have been introduced to the market and qualified for use in HVM. While innovative measurement methods and tool architecture have allowed for a leap of improvement in throughput, the next step in further reducing imaging time can be obtained through the application of machine learning for enhancing the resolution of measured images for extraction of relevant parameters. In this work, we provide the general framework under which a neural network-based resolution enhancer is designed and used for SPM images. We showcase the effectiveness of this framework using measurements performed on Line/Space structures with a pitch of 200 nm. For the reusability of a pre-developed pre-trained model, we additionally leverage transfer learning and show that a new model for slightly differing structures can be re-trained and calibrated with a smaller data set of measurements performed on Line/Space structures with a pitch of 100 nm.

As LLMs achieved breakthroughs in general reasoning, their proficiency in specialized scientific domains reveals pronounced gaps in existing benchmarks due to data contamination, insufficient complexity, and prohibitive human labor costs. Here we present SPM-Bench, an original, PhD-level multimodal benchmark specifically designed for scanning probe microscopy (SPM). We propose a fully automated data synthesis pipeline that ensures both high authority and low-cost. By employing Anchor-Gated Sieve (AGS) technology, we efficiently extract high-value image-text pairs from arXiv and journal papers published between 2023 and 2025. Through a hybrid cloud-local architecture where VLMs return only spatial coordinates "llbox" for local high-fidelity cropping, our pipeline achieves extreme token savings while maintaining high dataset purity. To accurately and objectively evaluate the performance of the LLMs, we introduce the Strict Imperfection Penalty F1 (SIP-F1) score. This metric not only establishes a rigorous capability hierarchy but also, for the first time, quantifies model "personalities" (Conservative, Aggressive, Gambler, or Wise). By correlating these results with model-reported confidence and perceived difficulty, we expose the true reasoning boundaries of current AI in complex physical scenarios. These insights establish SPM-Bench as a generalizable paradigm for automated scientific data synthesis.

Deep unfolding networks (DUNs), combining conventional iterative optimization algorithms and deep neural networks into a multi-stage framework, have achieved remarkable accomplishments in Image Restoration (IR), such as spectral imaging reconstruction, compressive sensing and super-resolution.It unfolds the iterative optimization steps into a stack of sequentially linked blocks.Each block consists of a Gradient Descent Module (GDM) and a Proximal Mapping Module (PMM) which is equivalent to a denoiser from a Bayesian perspective, operating on Gaussian noise with a known level.However, existing DUNs suffer from two critical limitations: (i) their PMMs share identical architectures and denoising objectives across stages, ignoring the need for stage-specific adaptation to varying noise levels; and (ii) their chain of structurally repetitive blocks results in severe parameter redundancy and high memory consumption, hindering deployment in large-scale or resource-constrained scenarios.To address these challenges, we introduce generalized Deep Low-rank Adaptation (LoRA) Unfolding Networks for image restoration, named LoRun, harmonizing denoising objectives and adapting different denoising levels between stages with compressed memory usage for more efficient DUN.LoRun introduces a novel paradigm where a single pretrained base denoiser is shared across all stages, while lightweight, stage-specific LoRA adapters are injected into the PMMs to dynamically modulate denoising behavior according to the noise level at each unfolding step.This design decouples the core restoration capability from task-specific adaptation, enabling precise control over denoising intensity without duplicating full network parameters and achieving up to $N$ times parameter reduction for an $N$-stage DUN with on-par or better performance.Extensive experiments conducted on three IR tasks validate the efficiency of our method.