Hardware assurance relies on scanning electron microscopy (SEM) to verify nanoscale structures, but assembling the large, high-quality datasets required for automated analysis is impeded by time-intensive acquisition and strict intellectual property (IP) constraints on proprietary designs. We propose a privacy-preserving pipeline that secures IP by heavily distorting the functional design while generating a visually realistic synthetic dataset from a small set of initial examples. A StyleGAN first learns the distribution of hardware layout masks to generate novel, macroscopically varied structures. Subsequently, a conditional GAN (Pix2PixHD) translates these masks into realistic SEM images that preserve authentic textures and noise. The primary finding of this work is that a segmentation model trained exclusively on this synthetic data not only demonstrates a successful "sim-to-real" transfer to real images but also outperforms a baseline model trained on the limited real dataset. Because the underlying synthetic layouts are demonstrably novel and reproduce none of the specific proprietary routing of the original design, deploying the final segmentation model mitigates the risk of exposing sensitive IP to attacks like gradient inversion and membership inference, providing a highly secure, high-performance solution for hardware assurance.
Advanced semiconductor nodes drastically increased demand for Transmission Electron Microscopy (TEM), yet destructive sample preparation, slow imaging and high costs severely limit the availability of diverse datasets needed for downstream machine learning (ML). Synthetic data generation is becoming essential, but current generative models often miss TEM-specific noise, structural detail, and stochastic variability crucial for evaluation. We present a Denoising Diffusion Probabilistic Model (DDPM) framework for synthetic TEM image generation under extreme data scarcity. A progressive patch-based training strategy scales from low-resolution patches to full images, enabling from-scratch training with only 15 samples. We integrate a custom TrivialAugment adaptation, cross-process domain transfer, classifier guidance, and RePaint-style inpainting, culminating in full-image generation that preserves global structural and spatial relationships in compliance with FAB metrology requirements. Beyond synthesis, we repurpose DDPM feature representations for segmentation, partitioning encoder feature maps to obtain coherent region masks. Our synthetic images achieve up to MS-SSIM > 0.98 and qualitative expert assessment consistent with structural similarity results, facilitating downstream ML training for defect detection, segmentation, and metrology while preserving statistical and physical realism.
Precise parametric control over circuit geometry is essential for semiconductor inspection, yet obtaining sufficient real training data remains costly. Although generative models such as diffusion models and Generative Adversarial Networks (GANs) can augment training data, they cannot guarantee the nanometer-scale geometric accuracy required for metrology tasks. We propose a visual program synthesis framework in which a Vision-Language Model (VLM) converts inspection images into editable Domain-Specific Language (DSL) code describing circuit geometries, enabling controlled generation of training data with exact parameter manipulation. Because the VLM is trained solely on synthetic DSL-rendered data, a domain gap arises when processing real Scanning Electron Microscope (SEM) images. We bridge this gap with an input binarization strategy that strips SEM-specific texture and noise, letting the model focus on geometric structure. On the MIIC dataset, binarized inputs improve the mean Dice coefficient from 0.4393 to 0.5256 over the raw-input baseline, demonstrating that simple texture abstraction substantially mitigates the sim-to-real gap.
Large language models (LLMs) have emerged as a powerful tool for synthetic data generation. A particularly important use case is producing synthetic replicas of private text, which requires carefully balancing privacy and utility. We propose Realistic and Privacy-Preserving Synthetic Data Generation (RPSG), which uses private seeds and integrates privacy-preserving strategies, including a formal differential privacy (DP) mechanism in the candidate selection, to generate realistic synthetic data. Comprehensive experiments against state-of-the-art private synthetic data generation methods demonstrate that RPSG achieves high fidelity to private data while providing strong privacy protection.