Inverse Design of Multi-Layer Sub-Pixel-Resolution RF Passives Through Grayscale Diffusion with Flexible S-Parameter Conditioning

Future wireless systems are expected to transform the surrounding space from a passive propagation medium into a smart electromagnetic environment, where engineered surfaces control wave propagation, support wireless sensing, and create programmable electromagnetic fingerprints. A key challenge in realizing this vision is the inverse design of metasurfaces for tailored electromagnetic propagation. While forward analysis evaluates the response of a known geometry, the inverse task starts from a prescribed scattering signature and seeks a physically realizable structure that produces it. This inverse task is inherently nonlinear and often high-dimensional, while candidate solutions may be non-unique and provide no direct indication of practical realizability. Here, we introduce a conditional diffusion framework for inverse design of dielectric resonator metasurfaces from target angular scattering patterns. Trained on T-matrix simulated geometry-response pairs, the model learns a conditional distribution of geometries instead of a deterministic mapping, enabling multiple candidate designs for the ill-posed inverse problem. The best generated metasurface achieves a mean percentage error of 1.39%, outperforming CMA-ES optimization (4.1% after 10 h) while requiring only about one minute for after-training inference. The model also produces lower error distributions than deterministic neural baselines for out-of-distribution spectra, highlighting the potential of diffusion models for efficient metasurface design.

Inverse design of metasurfaces under continuous electromagnetic constraints requires generation of geometries that simultaneously satisfy stringent spectral specifications and remain manufacturable. Conventional approaches based on iterative full wave simulations are computationally prohibitive for large design spaces, while existing generative models often suffer from poor conditional controllability and limited fabrication awareness. In this regard, we propose a physics guided condition quality enhanced diffusion framework for the inverse design of metasurface based absorbers. Fabrication-aware constraints are incorporated to ensure practical realizability of the generated designs. The framework introduces a conditioning mechanism for continuous spectral specifications, wherein feature-wise linear modulation propagates the condition across the denoising hierarchy, enabling stable and accurate generation with improved spectral controllability. Further, to embed EM consistency directly into the generative learning process, a pre trained surrogate EM simulator is integrated within the diffusion training pipeline. The proposed framework generated physically realizable metasurface designs for diverse reflection characteristics in the frequency range of 2 to 18 GHz, achieving a very low average spectral mean squared error of 0.0006 and a high band alignment accuracy of 0.958. The framework also addresses the fundamentally non-unique nature of inverse EM design by enabling structured multimodal generation of geometrically distinct yet spectrally consistent metasurface designs for the same target response. The proposed model produces the suitable design in approximately 30 seconds, whereas the conventional approach can take several months under comparable computational resources. The efficiency of the model is also established via experimental measurements.

Kirigami is an increasingly useful fabrication method to produce shape-programmable metamaterial structures. However, inverse design remains difficult because deployment is nonlinear, and feasible cut layouts must satisfy discrete compatibility rules, avoid overlap, and map one target shape to valid designs. We present RL-Kirigami, an inverse design framework that combines optimal-transport conditional flow matching (OT-CFM) with reinforcement learning to generate compatible ratio fields for compact reconfigurable parallelogram quad kirigami. A marching decoder enforces global geometric compatibility, and Group Relative Policy Optimization (GRPO) aligns the generator with nondifferentiable rewards for silhouette matching, feasibility, and ratio-field regularity. Across procedurally generated target shape instances, a single sample from the pretrained OT-CFM prior reached $94.2$ sIoU and outperformed solver baselines while reducing forward simulator evaluations from hundreds to 1. GRPO improved accuracy to $94.91$ sIoU and, with regularity included, reduced $\mathrm{TV}(\mathbf{x})$ from 0.95 to 0.81 while maintaining $94.83$ sIoU. Generated layouts were exported to DXF and laser-cut in $50~μ\mathrm{m}$ polymeric sheets to produce deployable prototypes in $8.0 \pm 1.0$ minutes per part. These results support a manufacturing-aware inverse design workflow for deployable kirigami metamaterials under hard geometric feasibility constraints.