Improving Combined Detection and Classification of TEM Defects via Mask-Conditioned Latent Diffusion Augmentation

Advanced semiconductor nodes drastically increased demand for Transmission Electron Microscopy (TEM), yet destructive sample preparation, slow imaging and high costs severely limit the availability of diverse datasets needed for downstream machine learning (ML). Synthetic data generation is becoming essential, but current generative models often miss TEM-specific noise, structural detail, and stochastic variability crucial for evaluation. We present a Denoising Diffusion Probabilistic Model (DDPM) framework for synthetic TEM image generation under extreme data scarcity. A progressive patch-based training strategy scales from low-resolution patches to full images, enabling from-scratch training with only 15 samples. We integrate a custom TrivialAugment adaptation, cross-process domain transfer, classifier guidance, and RePaint-style inpainting, culminating in full-image generation that preserves global structural and spatial relationships in compliance with FAB metrology requirements. Beyond synthesis, we repurpose DDPM feature representations for segmentation, partitioning encoder feature maps to obtain coherent region masks. Our synthetic images achieve up to MS-SSIM > 0.98 and qualitative expert assessment consistent with structural similarity results, facilitating downstream ML training for defect detection, segmentation, and metrology while preserving statistical and physical realism.

The bottleneck in learning-based industrial defect detection is often limited not by model capacity, but by the scarcity of labeled defect data: defects are rare, annotations are expensive, and collecting balanced training sets is slow. We present an end-to-end pipeline for synthetic defect generation and annotation, combining Vision-Language-Model-based prompts, LoRA-adapted diffusion, mask-guided inpainting, and sample filtering with automatic label derivation, and demonstrates the potential of real data with realistic synthetic samples to overcome data scarcity. The evaluation is conducted on, a challenging dataset of pitting defects on ball screw drives, and then on a subset of the Mobile phone screen surface defect segmentation dataset (MSD) dataset to test cross-domain transfer. Beyond downstream detector performance, we analyze key stages of the pipeline, including prompt construction, LoRA selection, and sample filtering with DreamSim and CLIPScore, to understand which synthetic samples are both realistic and useful. Experiments with YOLOv26, YOLOX, and LW-DETR show that synthetic-only training does not replace real data. When combined with real data, synthetic defects can preserve performance and yield modest gains in selected BSData training regimes. The MSD transfer study shows that the overall pipeline structure carries over to a second industrial inspection domain, while also highlighting the importance of domain-specific adaptation and annotation-quality control. Overall, the paper provides an end-to-end assessment of diffusion-based industrial defect synthesis and shows that its strongest value lies in strengthening scarce real datasets rather than substituting for them.

Background and Objective: Generating realistic medical images with anatomically accurate segmentation masks helps address the shortage of annotated data in medical imaging, particularly in optical coherence tomography (OCT) of mouse eyes, where manual retinal layer delineation is labour-intensive due to tiny structures and required expertise, resulting in scarce datasets. While diffusion models perform well in medical image synthesis, joint image-mask generation has relied mainly on U-Net-based denoisers, leaving diffusion transformers largely unexplored. Methods: We propose a conditional dual-output Diffusion Transformer (DualDiT) for joint synthesis of OCT B-scans and segmentation masks of the upper retinal cell layers in ex vivo mouse retina. DualDiT encodes both modalities into a shared latent space via a pretrained VAE, concatenates their latent representations, and performs conditional diffusion over the joint tensor. We compared DualDiT against two adapted diffusion baselines: DDPM and LDM. Generative quality was assessed via Fréchet Inception Distance (FID) and spatial FID (sFID); practical utility via synthetic data augmentation for downstream U-Net segmentation; and perceptual realism via evaluation by three domain experts. Results: DualDiT achieved the best generative quality (FID 56.14, sFID 114.35), outperforming DDPM and LDM. Expert panels misclassified 46% of synthetic samples as real and 42% of real samples as synthetic. Adding DualDiT-generated images and masks improved Dice and IoU scores on a held-out segmentation test set. Conclusions: DualDiT shows that transformer-based diffusion models can effectively learn the joint distribution of OCT images and segmentation masks, surpassing DDPM- and LDM-based baselines in generative fidelity, downstream utility, and perceptual realism, highlighting its potential for data augmentation in annotation-scarce medical imaging.