The semiconductor sector faces a dual transition: scaling manufacturing execution through Artificial Intelligence (AI) while satisfying stringent sustainability mandates, such as the EU Carbon Border Adjustment Mechanism (CBAM). This paper presents a scoping review of 1,465 documents indexed in Web of Science and Scopus, spanning AI-integrated metrology, supply chain ESG, and federated industrial data spaces. Network analysis reveals a highly fragmented "core-periphery" knowledge structure, emphasizing a critical structural hole between AI-driven process optimization and downstream sustainability governance. To close these gaps, this study proposes a 6-layer Safe and Sustainable by Design (SSbD) architecture grounded in a System of Systems (SoS) paradigm. By establishing distinct "grid-to-core" and "standards-through-supply-chain" integration pathways, the proposed framework demonstrates how virtual metrology (VM), localized federated learning, and defensive RegTech mechanisms can build provenance-aware data fabrics. Ultimately, this architecture positions regulatory compliance as a driver for innovation, enabling secure, climate-neutral, and circular value chains in semiconductor manufacturing.
The convergence of the 2026 European Union Safe and Sustainable by Design (SSbD) framework, Corporate Sustainability Due Diligence Directive (CSDDD), and Carbon Border Adjustment Mechanism (CBAM) introduce a severe governance bottleneck for advanced semiconductor manufacturing facilities ("Smart Fabs"). Regulatory compliance demands have surpassed the capacity of manual corporate reporting, creating a direct conflict between multi-stakeholder transparency and corporate data privacy. This paper addresses this challenge by introducing a zero-trust socio-technical orchestration framework that operationalizes a six-layer SSbD reference architecture within trustworthy industrial data spaces. We propose a shift from reactive automation to autonomous governance through "Professional Proxies"-role-based agentic workflows executing within hardware-isolated trust zones. Structured as an interoperable network protocol stack, the framework coordinates an automated, five-step "relay race" between Facility, Process Engineering, and Finance proxy teams to align factory-floor yield models with macro-level sustainability mandates. By executing Virtual Metrology (VM) predictions and Federated Machine Learning (FML) inside hardware-rooted Trusted Execution Environments (TEEs), this architecture resolves the Data Sovereignty Paradox, demonstrating how fabs can export cryptographically signed compliance tokens via International Data Spaces (IDS) connectors without exposing proprietary process recipes. Ultimately, this framework provides technology managers with a verifiable, evidence-based pathway toward resilient, net-zero Industry 5.0 ecosystems.
The rapid integration of artificial intelligence (AI) into critical infrastructure including healthcare, finance, energy, and defense, offers transformative benefits but also conflicts with evolving regulatory and governance frameworks. This paper presents a systematic literature review (SLR) to examine the challenges of balancing AI compliance and technological innovation across critical infrastructure sectors. The review follows established SLR guidelines to extract and synthesize insights from peer-reviewed articles, report, and institutional sources published between 2020-2025. The study identifies three interrelated challenges: fragmented regulations, excessive compliance burdens for smaller to medium enterprises (SMEs), and misaligned governance models. To address these challenges, the study highlights practical governance strategies, including risk-tiered regulation, compliance by design, and explainable AI, to support scalable and trustworthy AI deployment in critical sectors. Key contributions include a concise mapping of core AI-governance challenges and a conceptual diagram illustrating their overlap, as well as actionable strategies for policymakers and practitioner to harmonize oversight with innovation.
LLarge language model (LLM)-based AI agents deployed in manufacturing environments require populated, schema-correct data for validation, yet production MES data is proprietary, privacy-encumbered, and vendor-specific. This paper introduces the Template-as-Ontology principle: a single Python configuration module (700-770 lines, 45 validated exports) serves simultaneously as the specification for a time-stepped manufacturing simulator and as the runtime domain schema for AI analytics tools, producing alignment by construction rather than integration. We formally define the domain template as a typed relational configuration schema and prove that structural alignment between simulation and tool layers is guaranteed by single-source consumption. A five-layer pipeline--simulation, PostgreSQL, CDC/Iceberg lakehouse, star schema, and 12 parameterized AI tools--generates causally coherent, MES-shaped data spanning 66 entity types across four operational domains mapped to ISA-95/IEC 62264. We validate the architecture with six industry templates (aerospace, pharma, automotive, electronics, beverages, warehousing) running on identical framework code. Calibration experiments (60 runs, 10 seeds per template) confirm parametric controllability: observed KPIs fall within configured ranges across all templates. A controlled hallucination experiment (72 tool invocations, Qwen3-32B) demonstrates that ontology-constrained parameters eliminate tool-parameter fabrication (0% constrained vs. 43% unconstrained hallucination rate for the evaluated model, Fisher's exact test p < 10^-12); the 0% constrained rate is an architectural guarantee that holds for any model. The framework provides a reusable data layer for discrete manufacturing AI validation.