SHRAV: State-Hypothesis-Reason-Action-Verify Framework for Physical Modeling and Inverse Design

As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving mask optimization, optical imaging, resist exposure, and development, which existing models fail to capture. To overcome this limitation, we present LithoDreamer, the first physics-informed World Model (WM) framework for computational lithography, which formulates the ``Layout-Mask-Resist Image-After Development Image (ADI)'' pipeline as a decision-driven multi-step evolution system. LithoDreamer captures feature changes between adjacent states to model stage-specific physics-informed latent spaces, in which it controls process intervention exploration and drives subsequent state transitions. To achieve interpretable intervention optimization without continuous supervision, we propose a contrastive variational optimization paradigm that contrasts the latent differences between intervention paths with variational evolution constraints, guiding the model to generate evolutions consistent with real lithography physics. Experiments show LithoDreamer achieves state-of-the-art performance in forward evolution and inverse planning. Our lithography dataset is publicly available at GitHub (https://github.com/7jiangyq/lithodreamer.git).

Kirigami is an increasingly useful fabrication method to produce shape-programmable metamaterial structures. However, inverse design remains difficult because deployment is nonlinear, and feasible cut layouts must satisfy discrete compatibility rules, avoid overlap, and map one target shape to valid designs. We present RL-Kirigami, an inverse design framework that combines optimal-transport conditional flow matching (OT-CFM) with reinforcement learning to generate compatible ratio fields for compact reconfigurable parallelogram quad kirigami. A marching decoder enforces global geometric compatibility, and Group Relative Policy Optimization (GRPO) aligns the generator with nondifferentiable rewards for silhouette matching, feasibility, and ratio-field regularity. Across procedurally generated target shape instances, a single sample from the pretrained OT-CFM prior reached $94.2$ sIoU and outperformed solver baselines while reducing forward simulator evaluations from hundreds to 1. GRPO improved accuracy to $94.91$ sIoU and, with regularity included, reduced $\mathrm{TV}(\mathbf{x})$ from 0.95 to 0.81 while maintaining $94.83$ sIoU. Generated layouts were exported to DXF and laser-cut in $50~μ\mathrm{m}$ polymeric sheets to produce deployable prototypes in $8.0 \pm 1.0$ minutes per part. These results support a manufacturing-aware inverse design workflow for deployable kirigami metamaterials under hard geometric feasibility constraints.

Large Language Models (LLMs) can generate Computer-Aided Design (CAD), yet lack physical comprehension required for reliable engineering design. Instead of attempting to implicitly learn physical laws from data, we propose a Hybrid Agentic-Physical Architecture that embeds validated knowledge-based engineering tools directly into the decision making loop of autonomous AI agents. In this framework, engineering design is formulated as a closed-loop, sequential decision making process guided by explicit physical verification. Based on a load case, dedicated agents iteratively plan, generate, evaluate, and revise engineering designs using knowledge-based tools as a feedback signal. We introduce a benchmark dataset and metrics for assessing functional validity in generative CAD. Our system generates more complex and physically verified designs, with a 4.2 increase in structural complexity and improving compile rate by 3.5% compared to similar agentic methods. The codebase, prompts and dataset will be made publicly available to support reproducibility and future research.