Silicon Wafer Production Monitoring
Silicon wafer production monitoring aims to improve yield and quality by detecting defects and predicting process outcomes using sensor data and wafer defect maps. Current research heavily utilizes machine learning, employing algorithms like LSTM networks, gradient boosting trees, and specialized convolutional neural networks designed for sparse data, to analyze sensor readings and image data for defect detection and process prediction. These advanced analytical techniques offer significant potential for optimizing semiconductor manufacturing processes, leading to increased efficiency and reduced costs.
Papers
April 6, 2024
January 21, 2023
August 30, 2022
November 12, 2021